WZP60 6KV MF Plasma Cleaning Power Supply-Plasma cleaning power supply

WZP60 6KV MF Plasma Cleaning Power Supply

High voltage & high power 60kw MF magnetron sputtering power supply for coating machinePlasma cleaning power supply Used for cleaning, etching, activation and surface preparation under normal pressure 60KW medium frequency plasma cleaning power supply Output voltage: 6KV, maximum voltage 10KV Output current: 6.6A Output frequency: 25Kh

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Input voltage：380V
Output power：60KW
Output voltage(Max)：10KV
Output current(Max)：10A
Output frequency：25KHz
Custom：Yes

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Technical Specification

Items No.	WZP60-60KW
Input Voltage	AC380±10%V
Output Power	60KW
Output Current	0~75A
OutputVoltage	Work voltage 200~800V, no-load>1KV
OutputWave form	Quasi-sine-wave
OutputMode	Constant voltage / constant current / constant power
Regulation Precision	≤1%
Efficiency	≥90%
Power Factor	cosΦ≥0.9
Display Mode	Chinese, English LCD display
Communication Mode	CNC / Analog / RS485 / RS232
Output Protection	Output overvoltage / output overcurrent / output offset
Input Protection	Output overvoltage / output undervoltage / input overcurrent / open phase
Safety Protection	Grounding protection / leakage protection / external control protection / lightning protection / overheating
Insulation Class	B
Protect Grade	IP20
Protection Response Time	1uS
Temperature	0~35℃
Humidity	≤80%
Cooling mode	1~10kw air-cooled; 10kw~100kw water-cooled
Dimensions	600230600 (mm)
Net Weight	40.0kg

Type	Input Power	Maximum Current	Volume(mm)	Cooling Method
WZP2	2KW	2A	40095370	Wind
WZP5	5KW	6A	480135380	Wind
WZP10	10KW	12A	480135380	Wind
WZP20	20KW	26A	480135380	Water
WZP40	40KW	50A	480263550	Water
WZP60	60KW	75A	600230600	Water
WZP80	80KW	100A	600230600	Water
WZP100	100KW	125A	600460600	Water